Si + Glass wafer
Features
- Glass area has mirror finished surface
- Transmittance is same as original Borofloat 33
- Possible to use as insulating and/or light sheild material
Standard Specifications
| Material | TEMPAX |
| Wafer Size | ～200mm |
| Wafer thickness | 0.3～2.0mm |
| Flatness | ＜ 0.1mm（8inch） |
| TTV | ＜ 0.01mm |
| Material Gap | ＜ 0.1um |